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Semiconductor Measurements and Instrumentation |
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Semiconductor Measurements and Instrumentation
List Price: $70.00
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Manufacturer: McGraw-Hill Professional
Author: W. R. Runyan
Binding: Hardcover
Publication Date: 1998-02-01
Publisher: McGraw-Hill Professional
Label: McGraw-Hill Professional
Number Of Pages: 454
Features:
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Editorial Review:
The definitive reference on semiconductor characterization tools! Here, in one well-organized volume, are detailed explanations of the advanced and "traditional") techniques for evaluating virtually every criterion: crystal defects, impurity concentration, lifetime, film thickness, resistivity, and such critical electrical properties as mobility, Hall effect, and conductivity type. Reliable, high-accuracy methods of measuring hardness, stress, and various kinds of surface contamination are also included. In addition to its value as a practical everyday reference, the text also serves as an excellent user's guide to the latest methods of optical microscopy, scanning electron microscopy (SEM), electron microprobe analysis, transmission electron microscopy (TEM), Auger electron spectroscopy (AES), scanning probe microscopy (SPM), and secondary ion mass spectrometry (SIMS). This is the only guide that offers such "dual coverage" of its topic -- in terms of both measurements and tools.
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Customer Reviews
Average Customer Rating: 
useful variety of instruments and measurements 2006-12-17
Don't be put off by the fact that the book was written in 1998. While Moore's Law is still ongoing in the semiconductor industry, much of the book's material is quite up to date. The measurement techniques are mostly fundamental. Runyan describes the many different properties of a semiconductor chip and how you can measure these. This is then related to how best the chip can be characterised. Or, in some cases, a given circuit.
Accompanying this is a natural complementary description of a variety of instruments. So the ideas behind such devices as a TEM or an SEM are explained. The quantum mechanical aspect of some of the measurements is gone into only slightly. Mostly directed at the experimentalist.
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